Masafumi Ise

Title: The Innovative Contributions of Masafumi Ise

Introduction

Masafumi Ise, an accomplished inventor based in Yokosuka, Japan, has made significant strides in the field of charged particle beam writing technology. With a total of three patents to his name, Ise’s work has set new standards in precision and efficiency within the industry.

Latest Patents

Ise's latest inventions include the multi charged particle beam writing apparatus and the multi charged particle beam writing method. One of the embodiments of his multi charged particle beam writing apparatus features an innovative data management system that consists of a first storage for writing data and a second storage for correction data. This system addresses errors in writing positions caused by factors such as substrate bending. His approach involves virtually dividing the writing region into blocks, allowing for smart allocation of cells within those blocks based on correction data. Additionally, a plurality of bitmap data generators is employed to segregate each block into meshes, calculating the required irradiation amount, thereby generating precise bitmap data that guides the writing process.

Another notable patent, the charged particle beam writing apparatus, incorporates advanced processing circuitry. This device calculates a third proximity effect correction irradiation coefficient, enabling the application of corrections at various order terms, refining the dose calculations for optimal performance in writing operations.

Career Highlights

Masafumi Ise is currently employed at Nuflare Technology, Inc., where he plays a key role in advancing the company's technological capabilities. His expertise in particle beam technology has been instrumental in developing innovative solutions that enhance writing speed and accuracy.

Collaborations

Throughout his career, Ise has collaborated with esteemed colleagues such as Yasuo Kato and Tomohiro Iijima. These partnerships have fostered an environment of creativity and technical innovation, further propelling advancements in their shared field of expertise.

Conclusion

Masafumi Ise's contributions to the realm of charged particle beam writing are a testament to his inventive spirit and dedication to technology. With a remarkable portfolio featuring three patents, Ise continues to influence the industry and refine the methods used in high-precision writing applications. His work not only showcases his innovative abilities but also highlights the significance of collaboration in pushing the boundaries of technological advancement.