Mary Wu

Title: Mary Wu - Innovator in 3D Measurement Technologies

Introduction

Mary Wu is a prominent inventor based in Fremont, CA (US). She has made significant contributions to the field of critical dimension measurement in three-dimensional (3D) modeling. Her innovative work has led to the development of methods that enhance the accuracy and efficiency of measuring critical dimensions in various applications.

Latest Patents

Mary Wu holds 1 patent for her invention titled "Critical dimension measurement in 3D with geometric models." This patent outlines methods that include acquiring a series of images or spectra of a volume of a model sample. It also involves reconstructing a 3D image of the volume, constructing a 3D model by segmenting the reconstructed image, and fitting primitive geometrical shapes to the segmentation. Additionally, the methods include acquiring test sample images or spectra and measuring test sample critical dimensions using the constructed 3D model to guide analysis of test spectra or images. The patent also discloses optical critical dimension (OCD) methods and systems.

Career Highlights

Mary Wu has established herself as a key figure in her field through her innovative work. She is currently associated with FEI Company, where she continues to develop and refine her technologies. Her expertise in 3D measurement has positioned her as a valuable asset in the industry.

Collaborations

Mary has collaborated with notable colleagues, including Daniel Lichau and Erik Franken. These partnerships have contributed to the advancement of her research and the successful implementation of her patented technologies.

Conclusion

Mary Wu is a trailblazer in the realm of 3D measurement technologies, with her innovative patent showcasing her expertise and dedication to advancing the field. Her contributions continue to influence the industry and inspire future innovations.