This inventor holds 3 USPTO granted patents and 2 published patent applications. Top assignee: Applied Materials, Inc.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Innovations by Martin Perez Guzman
Introduction
Martin Perez Guzman is an accomplished inventor based in Santa Clara, CA. He holds a total of 3 patents that showcase his expertise in the field of semiconductor technology. His work primarily focuses on enhancing the efficiency and functionality of semiconductor manufacturing processes.
Latest Patents
One of his latest patents is titled "Vacuum sealing integrity of cryogenic electrostatic chucks using non-contact surface temperature measuring probes." This invention relates to a substrate support assembly and an apparatus for measuring the temperature of a substrate disposed on the support assembly. In this embodiment, the substrate temperature measurement apparatus includes a substrate support assembly, a probe assembly, and a probe target. The substrate support assembly features an electrostatic chuck and one or more plates. The probe assembly extends through these plates and includes an optical probe sensor, an optical fiber, and an insulating sheath surrounding the optical fiber. The probe target, which includes a phosphor coating, is in contact with the electrostatic chuck and is spaced from the probe assembly.
Another significant patent is "Fluid conduit and flange for high bias applications." This invention describes a method and apparatus for cooling a semiconductor chamber. The semiconductor chamber component includes a powered region, a grounded region, and a fluid conduit made of ceramic material that passes through both regions.
Career Highlights
Martin Perez Guzman is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His contributions to the field have been instrumental in advancing semiconductor manufacturing technologies.
Collaborations
He has collaborated with notable coworkers such as Stephen Donald Prouty and Andrew Antoine Noujaim, further enhancing the innovative environment at Applied Materials, Inc.
Conclusion
Martin Perez Guzman is a significant figure in the semiconductor industry, with a focus on innovative solutions that improve manufacturing processes. His patents reflect his commitment to advancing technology in this critical field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile