Markus Thomann

Title: Innovations of Markus Thomann in Charged Particle Beam Technology

Introduction

Markus Thomann is a notable inventor based in Poing, Germany. He has made significant contributions to the field of charged particle beam technology. His innovative work focuses on the development of advanced apparatuses for inspecting specimens using charged particle beams.

Latest Patents

Thomann holds a patent for a "Charged particle beam apparatus, multi-beamlet assembly, and method of inspecting a specimen." This invention describes a charged particle beam apparatus designed for inspecting a specimen with multiple beamlets. The apparatus includes a charged particle beam emitter that generates a charged particle beam propagating along an optical axis. It features a multi-beamlet generation and correction assembly, which consists of a first multi-aperture electrode with a plurality of apertures for creating beamlets, as well as additional electrodes for field curvature correction. The assembly is configured to focus the beamlets, allowing for precise inspection of specimens.

Career Highlights

Thomann is associated with Ict Integrated Circuit Testing Gesellschaft Für Halbleiterprüftechnik Mbh, where he applies his expertise in semiconductor testing. His work has been instrumental in advancing the capabilities of charged particle beam technology.

Collaborations

Thomann has collaborated with notable colleagues, including Benjamin John Cook and Dieter Winkler. Their combined efforts contribute to the ongoing development and refinement of technologies in the field.

Conclusion

Markus Thomann's innovative contributions to charged particle beam technology highlight his role as a significant inventor in the field. His patent and work at Ict Integrated Circuit Testing demonstrate his commitment to advancing inspection methods for semiconductor applications.