Markus Burian

Title: Innovations of Inventor Markus Burian

Introduction

Markus Burian is a notable inventor based in Villach, Austria. He has made significant contributions to the field of microelectromechanical systems (MEMS) with a focus on resonator technologies. With a total of 2 patents, his work has implications for various applications in electronics and engineering.

Latest Patents

One of Markus Burian's latest patents is a method of forming a resonator. This innovative method involves several steps, including providing a first layer, forming a sacrificial layer, and creating a capping layer. The process also includes forming etching apertures and additional apertures of different sizes, ultimately leading to the creation of a cavity and the release of a resonator structure. Another significant patent relates to MEMS resonator structures that enable the application of maximum available on-chip voltage. This invention includes a connection between a ground potential and the gap electrode of the resonator, enhancing the performance of MEMS devices.

Career Highlights

Markus Burian is currently employed at Infineon Technologies Dresden GmbH, where he continues to innovate in the field of MEMS technology. His work is characterized by a commitment to developing less complex manufacturing systems that allow for the production of MEMS resonators with reduced dimensions.

Collaborations

Throughout his career, Markus has collaborated with talented individuals such as Thoralf Kautzsch and Heiko Froehlich. These collaborations have contributed to the advancement of his research and the successful development of his patents.

Conclusion

Markus Burian's contributions to the field of MEMS resonators highlight his innovative spirit and dedication to advancing technology. His patents reflect a deep understanding of resonator structures and their applications, making him a valuable figure in the engineering community.