Fremont, CA, United States of America

Mark Weise


Average Co-Inventor Count = 2.4

ph-index = 3

Forward Citations = 634(Granted Patents)


Location History:

  • San Jose, CA (US) (1998 - 2001)
  • Fremont, CA (US) (2010)

Company Filing History:


Years Active: 1998-2010

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4 patents (USPTO):

Title: Mark Weise: Innovator in Semiconductor Technology

Introduction

Mark Weise is a prominent inventor based in Fremont, CA, known for his contributions to semiconductor technology. With a total of 4 patents to his name, he has made significant advancements in the field, particularly in the area of semiconductor systems and processes.

Latest Patents

One of Weise's latest patents is for a semiconductor system with surface modification. This innovative system includes providing a dielectric layer and a conductor within that layer, which is exposed at the top. The process involves capping the exposed conductor and modifying the surface of the dielectric layer. This modification includes cleaning conductor ions from the dielectric layer by dissolving the conductor in a low pH solution, mechanically enhanced cleaning, or chemisorbing a hydrophobic layer on the dielectric layer.

Another notable patent is for a process for depositing a SiOx film that has reduced intrinsic stress and/or reduced hydrogen content. This process is applicable to both plasma-enhanced and electron cyclotron resonance chemical vapor deposition of silicon dioxide. By introducing a vapor phase etchant during the growth of the silicon dioxide film, the process allows for selective removal of high-energy silicon dioxide molecules, thereby reducing intrinsic stress within the film. The use of halogen etchants further minimizes the amount of hydrogen present as hydroxyl within the film.

Career Highlights

Mark Weise is currently employed at Lam Research Corporation, a leading company in the semiconductor industry. His work focuses on developing advanced technologies that enhance the performance and reliability of semiconductor devices.

Collaborations

Throughout his career, Weise has collaborated with notable colleagues, including Dean R. Denison and Paul K. Shufflebotham. These collaborations have contributed to the successful development of innovative technologies in the semiconductor field.

Conclusion

Mark Weise's contributions to semiconductor technology through his patents and work at Lam Research Corporation highlight his role as a key innovator in the industry. His advancements in semiconductor systems and processes continue to influence the field significantly.

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