The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2010
Filed:
Jun. 08, 2007
Artur Kolics, Dublin, CA (US);
Nanhai LI, San Jose, CA (US);
Marina Polyanskaya, Morgan Hill, CA (US);
Mark Weise, Fremont, CA (US);
Jason Corneille, San Jose, CA (US);
Artur Kolics, Dublin, CA (US);
Nanhai Li, San Jose, CA (US);
Marina Polyanskaya, Morgan Hill, CA (US);
Mark Weise, Fremont, CA (US);
Jason Corneille, San Jose, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A semiconductor system includes: providing a dielectric layer; providing a conductor in the dielectric layer, the conductor exposed at the top of the dielectric layer; capping the exposed conductor; and modifying the surface of the dielectric layer, modifying the surface of the dielectric layer, wherein modifying the surface includes cleaning conductor ions from the dielectric layer by dissolving the conductor in a low pH solution, dissolving the dielectric layer under the conductor ions, mechanically enhanced cleaning, or chemisorbing a hydrophobic layer on the dielectric layer.