Mark Plemmons

Title: Mark Plemmons: Innovator in Wafer Surface Feature Detection

Introduction

Mark Plemmons is an accomplished inventor located in Livermore, CA. He has made significant contributions to the field of surface feature detection in semiconductor manufacturing. His innovative work has led to the development of technology that greatly enhances the accuracy and efficiency of detecting defects in wafer surfaces.

Latest Patents

Plemmons holds one patent titled "Systems and methods for wafer surface feature detection and quantification." This patent discloses interferometer systems and methods designed to improve defect detection and quantification on both patterned and bare wafer surfaces. The technology features the use of amplitude maps in addition to phase maps, which enhances the detection capabilities of surface features. Furthermore, innovative local unwrapping techniques are introduced to provide detailed height and depth information about the detected defects, ensuring a comprehensive analysis of wafer surfaces.

Career Highlights

Throughout his career, Plemmons has been associated with Kla Tencor Corporation, a key player in developing semiconductor manufacturing equipment. His work there has enabled the advancement of methods that support the fabrication of high-performance semiconductor devices. The impact of his patent extends to enhancing manufacturing processes, ensuring that products meet stringent quality standards.

Collaborations

In his professional journey, Plemmons has collaborated with notable colleagues, including Haiguang Chen and Jaydeep K Sinha. Together, they have worked on innovative solutions that push the limits of current technologies in the semiconductor industry.

Conclusion

Mark Plemmons stands out as a significant contributor to the field of wafer surface feature detection. His innovative patent demonstrates a commitment to improving efficiency and accuracy in semiconductor manufacturing. As technology continues to evolve, Plemmons’ contributions will likely play a crucial role in shaping the future of the industry.