Kla Tencor Corporation

Mark Plemmons

Jaydeep K Sinha

Haiguang Chen

Shouhong Tang

Sergey Kamensky

Enrique Chavez

Interferometer systems and methods for providing improved defect detection and quantification are disclosed. The systems and methods in accordance with the present disclosure may detect surface defects on patterned or bare wafer surfaces and subsequently quantify them. In certain embodiments in accordance with the present disclosure, amplitude maps of the wafer surfaces are obtained and are utilized in addition/alternative to phase maps for wafer surface feature detection. Furthermore, local one-dimensional and/or two-dimensional unwrapping techniques are also disclosed and are utilized in certain embodiments in accordance with the present disclosure to provide height and depth information of the detected defects, further improving the detection capabilities of the measurement systems.

Growing community of inventors

Livermore, CA, United States of America

Mark Plemmons