This inventor holds 4 USPTO granted patents. Top assignees: Novellus Systems Incorporated, Lam Research Corporation. Active years: 2004-2019.
Location History:
- Santa Clara, CA (US) (2004 - 2005)
- San Jose, CA (US) (2015 - 2019)
Company Filing History:
Years Active: 2004-2019
Title: The Innovative Mind of Mark K. Tan: Revolutionizing Semiconductor Handling
Introduction
Mark K. Tan is an accomplished inventor based in San Jose, California, known for his significant contributions to the field of semiconductor technology. With a total of four patents, he has developed groundbreaking systems that enhance the efficiency and reliability of semiconductor wafer handling. His work reflects a commitment to innovation and technical excellence.
Latest Patents
Among his recent inventions, Tan has developed a vacuum robot positioning system with reduced sensitivity to chamber pressure. This innovative system is designed for mounting vacuum robot arms in horizontally elongate vacuum transfer modules, providing mechanical isolation against deflections in the housing caused by changes in pressure. Such advancements help maintain precision in the positioning of the end effector, thereby improving operational efficiency.
Tan’s other notable patent is a mass damper specifically tailored for semiconductor wafer handling end effectors. This calibrated mass damper effectively reduces vibrational responses during the handling process without necessitating structural modifications to the end effector. This invention showcases his ability to enhance existing technologies while maintaining their fundamental design integrity.
Career Highlights
Throughout his career, Mark K. Tan has held key roles in influential companies, including Novellus Systems Incorporated and Lam Research Corporation. His experience in these leading organizations has allowed him to develop and refine technologies that have a lasting impact on the semiconductor industry.
Collaborations
Tan has collaborated with notable professionals in the field, including coworkers Richard M. Blank and Nicholas Michael Kopec. These collaborations have undoubtedly played a role in his innovative endeavors, fostering an environment of shared knowledge and creativity.
Conclusion
Mark K. Tan exemplifies the spirit of innovation in the technology sector. His patents contribute to advancing semiconductor handling systems, reflecting his dedication to solving complex engineering challenges. As he continues to push the boundaries of technology, Tan remains a key figure in fostering advancements that shape the future of the semiconductor industry.

