Company Filing History:
7 out of 3,785 
1 out of 14,087 
Years Active: 2002-2017
Title: Mark Ian Wagner: Innovator in Microelectronics Processing
Introduction
Mark Ian Wagner is a prominent inventor based in Austin, Texas, known for his significant contributions to the field of microelectronics processing. With a total of eight patents to his name, Wagner has developed innovative methods that enhance the efficiency and effectiveness of etching processes in microelectronic applications.
Latest Patents
Wagner's latest patents include groundbreaking methods for preventing the precipitation of etch byproducts during etching and subsequent rinse processes. These methods involve selectively etching a layer of microelectronic topography using an etch solution that includes a fluid in a supercritical or liquid state. The process introduces a fresh composition of the etch solution into a process chamber while venting the chamber to inhibit the precipitation of etch byproducts. Additionally, a rinse solution may be introduced to further prevent such precipitation. Another notable patent focuses on methods and apparatus for displacing fluids from substrates using supercritical CO2. This processing chamber is designed for post-wet-etch removal of drying fluid, featuring a set of nozzles that deliver supercritical CO2 in a manner that minimizes recirculation loops and vortices.
Career Highlights
Throughout his career, Wagner has worked with esteemed companies such as Lam Research Corporation and 3M Innovative Properties Company. His experience in these organizations has allowed him to refine his expertise in microelectronics and contribute to advancements in the industry.
Collaborations
Wagner has collaborated with notable professionals in his field, including James P. DeYoung and Stephen D. Meyer. These collaborations have further enriched his work and led to innovative solutions in microelectronics processing.
Conclusion
Mark Ian Wagner's contributions to microelectronics processing through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in the field, showcasing the importance of innovation in technology.