Location History:
- Austin, TX (US) (1994 - 2000)
- San Jose, CA (US) (2000)
Company Filing History:
Years Active: 1994-2000
Title: Mark G Fernandes: Innovator in Semiconductor Processing
Introduction
Mark G Fernandes is a notable inventor based in Austin, TX (US). He has made significant contributions to the field of semiconductor processing, holding a total of 4 patents. His work focuses on improving the efficiency and effectiveness of conductive layer processing in semiconductor manufacturing.
Latest Patents
One of his latest patents is titled "Method of processing a conductive layer and forming a semiconductor." This innovative method involves a degas step after precleaning a doped polysilicon layer of a gate stack. The process aims to reduce particle count and defectivity by subjecting the substrate and conductive layer to elevated temperatures under vacuum conditions. This technique ensures that liberated species do not contribute to particle count at the interface between conductive layers.
Another significant patent is for a "Low selectivity chemical mechanical polishing (CMP) process for use on a metal layer." This method utilizes a hydrophilic polish pad with specific hardness and a slurry containing silica and an acidic-based oxidizer. The result is a controlled polish that achieves a low selectivity ratio, allowing for precise polishing of metal layers in semiconductor devices.
Career Highlights
Mark G Fernandes is currently employed at Motorola Corporation, where he continues to innovate in semiconductor technologies. His work has been instrumental in advancing the methods used in the industry, contributing to the development of more efficient manufacturing processes.
Collaborations
Throughout his career, Fernandes has collaborated with notable colleagues, including Stanley Michael Filipiak and Jeffrey T Wetzel. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Mark G Fernandes is a prominent figure in the semiconductor industry, recognized for his innovative patents and contributions to conductive layer processing. His work at Motorola Corporation and collaborations with esteemed colleagues highlight his commitment to advancing technology in this critical field.