Mark Feygin

Title: Mark Feygin: Innovator in Semiconductor Lithography

Introduction

Mark Feygin is a notable inventor based in Aalen, Germany. He has made significant contributions to the field of semiconductor lithography, particularly through his innovative patent. His work is essential in advancing technology in this critical area of electronics manufacturing.

Latest Patents

Mark Feygin holds a patent for a "Projection exposure apparatus for semiconductor lithography." This invention features a projection optical unit that includes a sensor frame, a carrying frame, and a module. The module consists of an optical element and actuators designed for precise positioning and orientation of the optical element. The infrastructure of the module includes interfaces that facilitate the separation of the module from the projection optical unit. This design allows for the exchange of the module while maintaining the reference within the projection exposure apparatus.

Career Highlights

Mark Feygin is associated with Carl Zeiss SMT GmbH, a leading company in the field of optical systems and semiconductor manufacturing equipment. His role at the company has allowed him to work on cutting-edge technologies that are pivotal for the advancement of semiconductor lithography.

Collaborations

Throughout his career, Mark has collaborated with talented individuals such as Jens Kugler and Stefan Xalter. These collaborations have contributed to the development of innovative solutions in the semiconductor industry.

Conclusion

Mark Feygin's contributions to semiconductor lithography through his patent and work at Carl Zeiss SMT GmbH highlight his importance as an inventor in the field. His innovations continue to influence the technology that drives modern electronics.