Mark Chang

Title: The Innovations of Mark Chang in Lithography Technology

Introduction

Mark Chang, an inventor based in Hsin-Chu, Taiwan, has made notable contributions to the field of lithography technology. With one patent to his name, he focuses on improving processes that are critical to semiconductor manufacturing. His work at Taiwan Semiconductor Manufacturing Company Limited positions him at the forefront of innovation in this essential industry.

Latest Patents

Mark Chang holds a patent titled "Pellicle aging estimation and particle removal from pellicle via acoustic waves." This innovative invention addresses the challenges associated with pellicles, which are essential protective layers over lithography masks. The patent describes a system where an acoustic wave generator causes the pellicle to vibrate at a target resonance frequency. A resonance detection tool is then used to determine the actual resonance frequency, enabling one or more electronic processors to assess the pellicle's age based on the frequency shift. This technology is pivotal for enhancing lithography processes, ultimately leading to better semiconductor manufacturing quality.

Career Highlights

Throughout his career, Mark has demonstrated exceptional skill and creativity in the realm of semiconductor technology. His work at Taiwan Semiconductor Manufacturing Company Limited has contributed to advancements that enhance efficiency and precision in manufacturing processes. This commitment to innovation highlights his significant role within the company and the industry.

Collaborations

While working at Taiwan Semiconductor Manufacturing Company Limited, Mark Chang has collaborated with esteemed colleagues, including Yu-Ching Lee and Ching-Fang Yu. Together, they contribute to a culture of innovation and excellence within the organization, pushing the boundaries of what is possible in the semiconductor field.

Conclusion

Mark Chang stands as a testament to the impact of dedicated inventors in the technology sector. His patented invention not only highlights his innovative spirit but also reflects the ongoing advancements in lithography technology. As the industry evolves, Chang’s work serves as a foundation for future developments, reinforcing the crucial role that creativity and invention play in the semiconductor manufacturing landscape.