Mark A Logan

Title: The Innovations of Mark A. Logan

Introduction

Mark A. Logan, based in Carlsbad, California, is a visionary inventor recognized for his contributions to semiconductor technology. With a portfolio of five patents, Logan has significantly impacted the field by developing advanced systems and processes that enhance the efficiency and quality of semiconductor fabrication.

Latest Patents

Among his latest patents, Logan has developed a "CVD Platen Heater System Utilizing Concentric Electric Heating Elements." This invention presents a wafer support platen heating system for low-pressure chemical vapor deposition. It features multiple resistance heaters that allow for individual heating of various platen sections, creating either a uniform or non-uniform temperature gradient across the surface. The unique design includes spiral-shaped main resistance heaters along with edge loss graphite resistance heaters strategically positioned within the inner and outer diameters.

Another notable patent is the "Simultaneous Glass Deposition and Viscoelastic Flow Process." This innovative process facilitates the formation of planar and semi-planar insulator structures on semiconductor devices. By feeding vaporized reactants into a reaction chamber at elevated temperatures, Logan's method achieves high-quality, uniform glass layers while ensuring topographical planarization without voids and inconsistencies. This process enables effective fusion temperature compatibility, enhancing the overall manufacturing efficacy.

Career Highlights

Logan's professional journey includes impactful roles at notable companies such as Lam Research Corporation and Air Products and Chemicals, Inc. His experience in these organizations has provided valuable insights and expertise that he applies to his innovative projects, striving for excellence in semiconductor technology.

Collaborations

Throughout his career, Mark A. Logan has collaborated with several esteemed professionals, including Joseph R. Monkowski and Justice N. Carman. Working alongside such talented individuals has undoubtedly contributed to his innovative thinking and advancement in the industry.

Conclusion

Mark A. Logan stands out as an influential inventor whose work continues to shape the future of semiconductor technology. His patents reflect a deep understanding of both theoretical and practical aspects of engineering, making significant strides in the development of efficient and high-quality semiconductor fabrication processes. As innovations in this field continue to evolve, Logan's contributions will likely play a crucial role in paving the way for future advancements.