Tokyo, Japan

Mariko Ozawa

This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2015.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Mariko Ozawa. Retrieved from https://idiyas.com/inventor/mariko-ozawa

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank
USPTO Granted Patents = 1 

Average Co-Inventor Count = 3.0

ph-index = 1

Forward Citations = 1(Granted Patents)


Company Filing History:


Years Active: 2015

Loading Chart...
1 patent (USPTO):Explore Patents

Title: Mariko Ozawa: Innovator in Semiconductor Manufacturing

Introduction

Mariko Ozawa is a prominent inventor based in Tokyo, Japan. She has made significant contributions to the field of semiconductor manufacturing. Her innovative approach has led to the development of a unique method that enhances the efficiency and effectiveness of semiconductor devices.

Latest Patents

Mariko Ozawa holds a patent for a method for manufacturing semiconductor devices. This method involves preparing a structure that includes a substrate, an insulating layer with a recess, a barrier film, and a copper film. The process allows for the formation of copper wiring in the recess, followed by etching to create a recessed surface. The etching process utilizes an organic compound atmosphere and an oxygen gas cluster ion beam to achieve precise results.

Career Highlights

Throughout her career, Mariko has demonstrated exceptional skill and innovation in her field. She has been instrumental in advancing semiconductor technology, contributing to the development of more efficient manufacturing processes. Her work has garnered recognition within the industry, showcasing her expertise and dedication.

Collaborations

Mariko Ozawa has collaborated with notable colleagues, including Kenichi Hara and Takashi Hayakawa. These partnerships have further enriched her work and contributed to the success of her projects.

Conclusion

Mariko Ozawa is a trailblazer in the semiconductor manufacturing industry. Her innovative methods and collaborative spirit continue to drive advancements in technology. Her contributions are invaluable to the field, and her work will undoubtedly influence future developments in semiconductor devices.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
Loading…