Marijean E Azrak

Title: Marijean E Azrak: Innovator in Semiconductor Technology

Introduction

Marijean E Azrak is a renowned inventor based in Austin, TX, who has made significant contributions to the field of semiconductor technology. With a total of two patents to his name, Azrak's innovations focus on enhancing processes within semiconductor fabrication, particularly involving dielectric films and copper interconnects.

Latest Patents

One of Azrak's latest patents is for a **UV cure process and tool for low-k film formation**. This invention describes a process and system for forming a low dielectric film during semiconductor fabrication. The method involves depositing a carbon-doped silicon oxide film on a semiconductor wafer, followed by the application of ultraviolet light energy for curing. Notably, at least 30% of this light energy is at a frequency exceeding that of visible light. Importantly, this approach ensures that the wafer is not significantly heated during the application of light energy. Additionally, the invention includes a cluster tool, comprising chambers for organosilane sources and light energy application, all designed to streamline the wafer's movement throughout the process.

Azrak has also developed a **method for forming a copper layer over a semiconductor wafer**. This method aims to improve copper interconnects through an advanced electroplating process. The control system involved powers the cathode using a mix of various cycles—ranging from positive low-powered DC cycles to negative pulsed cycles—enhancing the electroplating efficiency of copper or similar metals onto the wafer. Throughout this electroplating procedure, in-situ process control or endpointing is utilized to further refine the quality of the resulting copper interconnects.

Career Highlights

Marijean Azrak is currently affiliated with Motorola Corporation, where he has been instrumental in driving forward innovations in semiconductor processes. Azrak's work is a testament to the importance of continuous development in technology, particularly in an industry that is pivotal to modern electronics.

Collaborations

At Motorola Corporation, Azrak's innovative edge is complemented by the expertise of his colleagues, including Kurt H Junker and Nicole R Grove. Their collaboration demonstrates a strong team dynamic, fostering an environment where groundbreaking inventions can thrive.

Conclusion

Marijean E Azrak stands as a key figure in semiconductor innovation, with patents that not only enhance current technologies but also establish new pathways for future developments. His work, particularly in low-dielectric film formation and copper electroplating, highlights the critical role inventors play in advancing technology and improving efficiencies in semiconductor manufacturing.