Location History:
- San Jose, CA (US) (1994 - 2000)
- Fishkill, NY (US) (2001)
Company Filing History:
Years Active: 1994-2001
Title: Maria Galiano: Pioneering Innovations in Semiconductor Processing
Introduction
Maria Galiano, based in San Jose, California, is an accomplished inventor with a remarkable portfolio of seven patents. Her innovative contributions primarily focus on enhancing processes within the semiconductor industry, demonstrating her expertise and commitment to advancing technology.
Latest Patents
Among her latest patents, one significant invention is titled "Use of Ozone in Process Effluent Abatement." This patent describes a method and apparatus designed to abate harmful compounds present in effluent gases generated by substrate processing systems. The innovative process involves introducing ozone into the combustion chamber of an abatement device along with the effluent gases. The application of energy, whether thermal or radio frequency, stimulates a reaction that neutralizes the harmful compounds, resulting in inert gases that can safely be exhausted.
Another noteworthy patent is the "Two-step Borophosphosilicate Glass Deposition Process and Related Devices and Apparatus." This technology involves a method for forming a borophosphosilicate glass (BPSG) film through a two-step deposition process. It enables the creation of a conformal BPSG layer on a substrate, followed by a more stable layer deposited at a higher rate, effectively filling narrow trenches as small as 0.06 microns with a high aspect ratio of at least 5.5:1.
Career Highlights
Maria Galiano has made significant strides in her career as an inventor at Applied Materials, Inc., a leader in the semiconductor manufacturing equipment sector. Her contributions to the field have solidified her reputation as an authority on innovative processing methods and materials.
Collaborations
Throughout her career, Maria has had the privilege of collaborating with esteemed colleagues, including Ellie Y. Yieh and Stuardo A. Robles. These partnerships have fostered an environment of shared innovation, driving the advancement of new technologies within the industry.
Conclusion
Maria Galiano's dedication to innovation in semiconductor processing is evident through her impressive patent portfolio and collaborative efforts with her peers. Her groundbreaking inventions continue to influence the industry, paving the way for future advancements and setting a benchmark for aspiring inventors.