This inventor holds 2 USPTO granted patents. Top assignee: Infineon Technologies Ag. Active years: 2003-2008.
Company Filing History:
Years Active: 2003-2008
Title: Marco Ahrens: Innovator in Lithography Technology
Introduction
Marco Ahrens is a notable inventor based in Hohenlinden, Germany. He has made significant contributions to the field of lithography, particularly in the development of advanced mask technologies. With a total of 2 patents to his name, Ahrens continues to push the boundaries of innovation in his field.
Latest Patents
Ahrens' latest patents include a lithography mask designed for imaging convex structures. This innovative mask features an angled structure element formed by two opaque segments, which includes at least one reflex angle. The design incorporates a convex section that faces the reflex angle, along with a transparent structure adjacent to the angled element. This configuration allows for enhanced imaging capabilities in lithography applications.
Another significant patent involves an OPC method for generating corrected patterns for a phase-shifting mask and its trimming mask. This method simplifies the correction of mask data for the production of very-large-scale integrated circuits through a two-step correction process. This advancement is crucial for improving the efficiency and accuracy of integrated circuit manufacturing.
Career Highlights
Marco Ahrens is currently employed at Infineon Technologies AG, a leading company in semiconductor solutions. His work at Infineon has allowed him to apply his innovative ideas in a practical setting, contributing to the company's success in the technology sector.
Collaborations
Ahrens has collaborated with notable colleagues such as Wilhelm Maurer and Juergen Knobloch. These partnerships have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.
Conclusion
Marco Ahrens is a distinguished inventor whose work in lithography technology has made a significant impact on the industry. His patents reflect a commitment to innovation and excellence, positioning him as a key figure in the advancement of semiconductor technologies.