This inventor holds 1 USPTO granted patent. Top assignees: Asm Lithography B.v., U.S. Philips Corporation. Active years: 1993.
Company Filing History:
1 out of 29 
1 out of 14,087 
Years Active: 1993
Title: Marcel C Baggen: Innovator in Optical Lithography
Introduction
Marcel C Baggen is a notable inventor based in Nuenen, Netherlands. He has made significant contributions to the field of optical lithography, particularly through his innovative designs and patents. His work has been instrumental in advancing technologies that require precise object manipulation.
Latest Patents
Marcel C Baggen holds a patent for a "Support device with a tiltable object table, and optical lithographic." This support device features a first and a second bearing unit that guide it along a base surface. It includes a straight guide that extends parallel to the base surface. The object table is coupled to a rigidification member and is displaceable in a z-direction, which is transverse to the base surface. It can also tilt about at least one axis of rotation directed parallel to the base surface, thanks to three force actuators. The design allows for accurate focusing of objects in sub-micron range applications, making it particularly suitable for optical lithographic devices.
Career Highlights
Throughout his career, Marcel has worked with prominent companies such as U.S. Philips Corporation and ASML Lithography B.V. His experience in these organizations has contributed to his expertise in the field of optical technologies and innovations.
Collaborations
Marcel has collaborated with notable colleagues, including Jan Van Eijk and Adrianus Gerardus Bouwer. These partnerships have further enriched his work and have led to advancements in optical lithography.
Conclusion
Marcel C Baggen is a distinguished inventor whose contributions to optical lithography have had a lasting impact on the industry. His innovative designs and collaborative efforts continue to influence advancements in technology.