Company Filing History:
Years Active: 2016
Title: **Marc Bienert: Innovating EUV Microlithography**
Introduction
Marc Bienert, an esteemed inventor based in Saarbruecken, Germany, has made significant contributions to the field of microlithography. With a career focused on advancing technological processes, he has been instrumental in developing equipment that enhances precision in semiconductor manufacturing.
Latest Patents
Marc Bienert holds a patent for a "Projection exposure apparatus for EUV microlithography and method for microlithographic exposure." This innovative apparatus features an illumination system designed to project patterns onto light-sensitive substrates with exceptional accuracy. It includes an advanced projection objective with a pupil plane that possesses an obscuration, creating a designed illumination pole that optimizes light intensity across varying polar and azimuth angles. This sophisticated design excludes a dark zone where light intensity dips below a predetermined minimum, ensuring consistent and reliable operation.
Career Highlights
Currently, Marc is a part of Carl Zeiss SMT GmbH, a company recognized for its ground-breaking optical systems and solutions. His work in creating efficient microlithographic exposure methods stands out as a notable achievement in his career. His innovative approach not only advances the technology used in the semiconductor industry but also contributes to the overall improvement of production processes.
Collaborations
Throughout his career, Marc Bienert has had the opportunity to collaborate with talented professionals such as Heiko Feldmann and Aksel Goehnermeier. These collaborations have fostered an environment of innovation and knowledge sharing, further enhancing the technological advancements in their field.
Conclusion
Marc Bienert's contributions to EUV microlithography exemplify the critical role of inventors in driving technological progress. With his patent and ongoing efforts at Carl Zeiss SMT GmbH, he continues to influence the landscape of semiconductor manufacturing, ensuring that advancements in this field meet the growing demands of modern technology.