Company Filing History:
Years Active: 2008-2010
Title: Innovations by Mao D Lim: Cleaning Solutions for CVD Chambers
Introduction
Mao D Lim is a distinguished inventor based in San Jose, California. With a portfolio of four issued patents, he has made significant contributions to the field of chemical vapor deposition (CVD) technology. His innovative methods and apparatuses aim to enhance the efficiency and effectiveness of CVD chamber cleaning processes.
Latest Patents
Mao D Lim's latest patent focuses on a method and apparatus for cleaning a CVD chamber. This invention utilizes cleaning gas energized to a plasma state within a gas mixing volume that is separated by an electrode from the reaction volume of the chamber. In one embodiment, a source of RF power is coupled to the chamber lid, while a switch facilitates the connection of a showerhead to either ground terminals or the RF power source. This innovative approach not only improves the cleaning process but also enhances operational efficiency.
Career Highlights
Mao D Lim has built his career at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work has focused on optimizing cleaning protocols to ensure that CVD chambers operate at peak performance. His experience and expertise in the field have positioned him as a key contributor to the advancement of semiconductor manufacturing technology.
Collaborations
Throughout his career, Mao has collaborated with other notable inventors, including Maosheng Zhao and Juan Carlos Rocha-Alvarez. These collaborations have fostered a creative environment that enables the development of groundbreaking technologies in the semiconductor and materials science sectors.
Conclusion
Mao D Lim's innovative methods for cleaning CVD chambers are a testament to his commitment to advancing technology in the semiconductor industry. As an inventor with multiple patents to his name, he continues to pave the way for new solutions that enhance manufacturing processes and environmental sustainability. His work at Applied Materials, Inc. underscores the vital role of inventors in shaping the future of technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.