Manoj Balakumar

Title: Innovations by Manoj Balakumar in CMP Processing

Introduction

Manoj Balakumar is an accomplished inventor based in Bengaluru, India. He has made significant contributions to the field of chemical mechanical polishing (CMP) systems, particularly in the manufacturing of electronic devices. With a total of two patents to his name, his work focuses on enhancing substrate handling systems and methods.

Latest Patents

Manoj's latest patents include innovative systems and methods for CMP processing. One of his patents describes a system for sequential single-sided CMP processing of opposite facing surfaces of a silicon carbide (SiC) substrate. This method involves urging a first surface of the substrate against one of a plurality of polishing pads, which are positioned on corresponding rotatable polishing platens. The process includes transferring the substrate between various stations using an end effector, ensuring precise alignment and handling.

Another notable patent addresses methods for detecting non-conforming substrate processing events during CMP. This invention outlines a method where a silicon carbide substrate is urged against a polishing pad in the presence of a polishing fluid. It includes monitoring the temperature of the polishing pad with a sensor and initiating a response if the temperature change exceeds a threshold value. These innovations are crucial for improving the efficiency and reliability of CMP processes.

Career Highlights

Manoj Balakumar is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His work at Applied Materials has allowed him to develop and refine his innovative ideas, contributing to advancements in CMP technology.

Collaborations

Throughout his career, Manoj has collaborated with talented professionals, including Jeonghoon Oh and Ashish Bhushan. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of cutting-edge technologies.

Conclusion

Manoj Balakumar's contributions to CMP processing through his patents demonstrate his expertise and commitment to innovation in the field. His work not only enhances substrate handling systems but also improves the overall efficiency of electronic device manufacturing.