Hitachinaka, Japan

Manabu Shirakihara


Average Co-Inventor Count = 3.0

ph-index = 1

Forward Citations = 2(Granted Patents)


Company Filing History:


Years Active: 2006

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1 patent (USPTO):Explore Patents

Title: Manabu Shirakihara: Innovator in Electron Microscopic Inspection Technology

Introduction

Manabu Shirakihara is a notable inventor based in Hitachinaka, Japan. He has made significant contributions to the field of electron microscopic inspection technology. His innovative approach has led to the development of a unique apparatus that enhances the inspection process for wafers used in semiconductor manufacturing.

Latest Patents

Shirakihara holds a patent for an electron microscopic inspection apparatus. This invention allows for the inspection of both wafers with copper wiring and those with non-copper wiring using a single unit. The design ensures that there is no risk of contamination from copper during the inspection process. All elements within the apparatus that come into contact with the wafers are duplicated or more, allowing for appropriate handling based on the type of wafer being inspected.

Career Highlights

Shirakihara is associated with Hitachi High-Technologies Corporation, where he has been instrumental in advancing inspection technologies. His work has been pivotal in improving the reliability and efficiency of semiconductor manufacturing processes. His innovative solutions have garnered attention in the industry, showcasing his expertise and commitment to technological advancement.

Collaborations

Some of his notable coworkers include Sho Takami and Tadashi Otaka. Their collaborative efforts contribute to the ongoing development of cutting-edge technologies in the field.

Conclusion

Manabu Shirakihara's contributions to electron microscopic inspection technology exemplify the impact of innovation in the semiconductor industry. His patent reflects a significant advancement that enhances the inspection process while preventing contamination. His work continues to influence the field and drive technological progress.

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