Aizuwakamatsu, Japan

Manabu Nakamura


Average Co-Inventor Count = 7.0

ph-index = 3

Forward Citations = 81(Granted Patents)


Company Filing History:


Years Active: 2006-2008

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3 patents (USPTO):Explore Patents

Title: Manabu Nakamura: Innovator in Semiconductor Memory Technology

Introduction

Manabu Nakamura is a prominent inventor based in Aizuwakamatsu, Japan. He has made significant contributions to the field of semiconductor memory devices, holding a total of three patents. His work focuses on enhancing the reliability and efficiency of memory technology, which is crucial in today's fast-evolving digital landscape.

Latest Patents

One of Manabu Nakamura's latest patents is a semiconductor memory device and manufacturing method. This innovation involves an ONO film where a silicon nitride film is formed using a plasma nitriding method with a plasma processor featuring a radial line slot antenna. The silicon nitride film is sandwiched between silicon oxide films, and a bit line diffusion layer is created in a memory cell array region through ion implantation. This process introduces lattice defects to the silicon nitride film via further ion implantation. As a result, a highly reliable semiconductor memory device is achieved, characterized by a high-quality nitride film formed under low-temperature conditions. Additionally, the nitride film serves as a charge trap film, effectively capturing charges and meeting the demands for miniaturization and high integration in modern technology.

Career Highlights

Throughout his career, Manabu Nakamura has worked with notable companies such as Spansion LLC and Fujitsu AMD Semiconductor Limited. His experience in these organizations has allowed him to refine his expertise in semiconductor technology and contribute to groundbreaking innovations in the field.

Collaborations

Manabu Nakamura has collaborated with esteemed colleagues, including Masahiko Higashi and Kentaro Sera. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and advancements in semiconductor technology.

Conclusion

Manabu Nakamura's contributions to semiconductor memory technology exemplify his dedication to innovation and excellence. His patents reflect a deep understanding of the complexities involved in memory device manufacturing, positioning him as a key figure in the industry.

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