This inventor holds 1 USPTO granted patent. Top assignee: Kabushiki Kaisha Toshiba. Active years: 1991.
Company Filing History:
Years Active: 1991
Title: Makiko Wakatsuki: Innovator in Wafer Processing Technology
Introduction
Makiko Wakatsuki is a prominent inventor based in Yokohama, Japan. She has made significant contributions to the field of semiconductor manufacturing, particularly in wafer processing methods. Her innovative approach has led to the development of a unique patent that enhances the efficiency and quality of wafer production.
Latest Patents
Wakatsuki holds a patent for a wafer processing method aimed at manufacturing high-quality silicon wafers. The process begins with cutting silicon monocrystalline ingots into slices to form silicon wafers. Subsequently, both the back side and main surfaces of the wafers undergo lapping and etching processes. The wafers are then submerged in substantially pure water, where ultrasonic waves are applied to clean at least one of the surfaces and form gettering damage on the wafer surface. Finally, the main surfaces, which are to have semiconductor elements formed on them, are polished to a mirror finish. This innovative method not only improves the cleaning process but also enhances the overall quality of the wafers produced.
Career Highlights
Wakatsuki is associated with Kabushiki Kaisha Toshiba, a leading company in the technology sector. Her work at Toshiba has allowed her to collaborate with other talented professionals in the field. She has made a notable impact through her research and development efforts, contributing to advancements in semiconductor technology.
Collaborations
Some of her coworkers include Yoshiaki Matsushita and Norihiko Tsuchiya. Their collaboration has fostered a creative environment that encourages innovation and the sharing of ideas.
Conclusion
Makiko Wakatsuki's contributions to wafer processing technology exemplify her dedication to innovation in the semiconductor industry. Her patent reflects her expertise and commitment to improving manufacturing processes. Through her work at Toshiba, she continues to influence the field and inspire future advancements.