Maggy Lau

Title: Maggy Lau: Innovator in Semiconductor Device Fabrication

Introduction

Maggy Lau is a prominent inventor based in Stevenson, California, known for her contributions to the field of semiconductor device fabrication. With a total of two patents to her name, she has made significant strides in improving the methods used in electron beam lithography.

Latest Patents

Maggy Lau's latest patents include innovative techniques for enhancing the alignment process in multi-level electron beam lithography. One of her notable patents focuses on the use of embedded high-Z marker material and processes for alignment. This invention aims to improve the fabrication of semiconductor devices by utilizing an alignment marker that includes tantalum. The method involves forming an alignment marker in a substrate, determining its edge location using a backscatter electron detector, and subsequently forming at least one transistor based on this precise location.

Career Highlights

Maggy Lau has established herself as a key figure in her field through her work at HRL Laboratories, LLC. Her expertise in semiconductor technology has positioned her as a valuable asset in the research and development of advanced electronic devices.

Collaborations

Maggy has collaborated with notable colleagues, including Christopher Bohn and Maxwell Choi, contributing to a dynamic and innovative work environment.

Conclusion

Maggy Lau's contributions to semiconductor device fabrication through her patents and collaborative efforts highlight her role as an influential inventor in the technology sector. Her work continues to pave the way for advancements in electron beam lithography and semiconductor manufacturing.