This inventor holds 3 USPTO granted patents. Top assignee: Tokyo Electron Limited. Active years: 2010-2014.
Location History:
- Nirasaki-shi, JP (2010)
- Tokyo, JP (2014)
- Nirasaki, JP (2014)
Company Filing History:
Years Active: 2010-2014
Title: Machi Moriya: Innovator in Semiconductor Manufacturing
Introduction
Machi Moriya is a prominent inventor based in Tokyo, Japan. She has made significant contributions to the field of semiconductor manufacturing, holding a total of 3 patents. Her innovative work has advanced the technology used in the production of semiconductor devices.
Latest Patents
Machi Moriya's latest patents include a method of manufacturing semiconductor devices and a system for manufacturing semiconductor devices. In her first patent, she describes a process where a target space ratio of a monitor pattern on a substrate for inspection is determined to differ from a ratio of 1:1. A range of space ratios in a library is established to include the target space ratio while excluding a space ratio of 1:1. The monitor pattern is formed on a film to be processed by executing predetermined processes on the substrate for inspection. The sizes of the monitor pattern are measured and converted into sizes of a pattern of the film to be processed, which has a space ratio of 1:1. Subsequently, the processing conditions of the predetermined processes are adjusted based on the sizes of the converted pattern. Finally, the predetermined processes are performed on a wafer under the compensated conditions to create a pattern with a space ratio of 1:1 on the film to be processed.
Her second patent outlines a processing method that includes a step for performing predetermined processing on a workpiece, an unnecessary portion removal step to eliminate any excess material produced during processing, and a surface structure evaluation step to assess the workpiece's surface after the removal of the unnecessary portion.
Career Highlights
Machi Moriya is currently employed at Tokyo Electron Limited, a leading company in the semiconductor industry. Her work at the company has allowed her to apply her innovative ideas and contribute to advancements in semiconductor technology.
Collaborations
Machi collaborates with talented coworkers, including Tsuyoshi Moriya and Keisuke Tanaka. Their teamwork fosters an environment of creativity and innovation, leading to groundbreaking developments in their field.
Conclusion
Machi Moriya is a trailblazer in semiconductor manufacturing, with her patents reflecting her expertise and innovative spirit. Her contributions continue to shape the future of technology in this critical industry.