Maarten P De Boer

Title: **Maarten P De Boer: Innovator in Microelectronics**

Introduction

Maarten P De Boer is an accomplished inventor based in Albuquerque, NM, with a focus on advancements in microelectronics and precision imaging technologies. With two patents to his name, De Boer has made significant contributions that enhance the capabilities of microelectromechanical systems (MEMS).

Latest Patents

De Boer's latest innovations include two noteworthy patents:

1. **Die Singulation Method and Package Formed Thereby**: This patent discloses a method for singulating die from a substrate that incorporates a sacrificial layer and one or more device layers. The technique involves the formation of a retainer in the device layers, anchored to the substrate. Through a process known as Deep Reactive Ion Etching (DRIE), a trench defines the shape of each die from the substrate's bottom side. A handle wafer is attached to facilitate the singulation of the die and the formation of a frame from the retainer and the substrate. This innovative approach allows for efficient packaging of singulated die using clamps or clips, while also incorporating stops to limit any sliding motion of the die.

2. **Long Working Distance Incoherent Interference Microscope**: This invention describes a full-field imaging microscope designed for three-dimensional imaging and metrology of MEMS devices. It features a long working distance of over 10 mm, allowing for the use of standard probes during analysis. This capability enables nanometer-scale height profiles of MEMS test structures to be acquired across an entire wafer while actively probing, with options for imaging through a transparent window. The design eliminates the need for an optically identical pair of sample and reference objectives, resulting in reduced system costs and streamlined sample magnification adjustments.

Career Highlights

Maarten P De Boer currently works at Sandia Corporation, where he applies his expertise in microelectronics to drive innovative solutions in the field. His work has significantly contributed to enhancing the performance and capabilities of MEMS technologies.

Collaborations

Throughout his career, De Boer has collaborated with notable colleagues, including Michael B Sinclair and Robert C Anderson, further fostering an environment of innovation and sharing of ideas within the microelectronics community.

Conclusion

Maarten P De Boer stands out as a key innovator in the field of microelectronics, with his patents reflecting a commitment to advancing technology in ways that benefit both the industry and academia. His contributions are essential for the continued growth and refinement of MEMS devices and imaging systems.