Eagle, ID, United States of America

M Rao Yalamanchili


Average Co-Inventor Count = 3.7

ph-index = 2

Forward Citations = 38(Granted Patents)


Company Filing History:


Years Active: 2001-2004

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2 patents (USPTO):Explore Patents

Title: M Rao Yalamanchili: Innovator in Semiconductor Processing

Introduction

M Rao Yalamanchili is a notable inventor based in Eagle, ID (US), recognized for his contributions to semiconductor processing technologies. He holds 2 patents that focus on innovative methods for treating semiconductor substrates, enhancing the efficiency and effectiveness of cleaning processes.

Latest Patents

Yalamanchili's latest patents include an "Apparatus and method for single substrate processing." This invention involves a method for treating a semiconductor substrate by positioning it in a single-substrate process chamber. The substrate undergoes wet etching, cleaning, and drying steps, with turbulence induced in the etch or clean chemistry to thin the boundary layer of fluid attached to the substrate. Additionally, megasonic energy may be utilized to optimize cleaning performance.

Another significant patent is the "Single-operation method of cleaning semiconductors after final polishing." This process allows for cleaning a final polished semiconductor wafer in a single operation, ensuring that the wafer surface is substantially free of contaminants. The method includes several steps, such as oxidizing organic carbon, immersing the wafer in a megasonically agitated alkaline cleaning solution, and rinsing it with deionized water.

Career Highlights

Throughout his career, Yalamanchili has worked with prominent companies in the semiconductor industry, including MEMC Electronic Materials, Inc. and SCP Global Technologies, Inc. His experience in these organizations has contributed to his expertise in semiconductor processing technologies.

Collaborations

Yalamanchili has collaborated with notable professionals in the field, including Kari B Myli and Larry W Shive. These collaborations have likely enriched his work and contributed to the development of his innovative patents.

Conclusion

M Rao Yalamanchili's contributions to semiconductor processing through his patents demonstrate his commitment to innovation in the field. His work continues to influence the industry, paving the way for advancements in semiconductor technology.

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