This inventor holds 3 USPTO granted patents. Top assignee: Applied Materials, Inc.. Active years: 2003-2009.
Company Filing History:
Years Active: 2003-2009
Title: Innovations of Lung-Tien Han
Introduction
Lung-Tien Han is a notable inventor based in San Jose, CA (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on advanced processes for film deposition and stress management in silicon oxide films.
Latest Patents
One of his latest patents is titled "Integrated process modulation (IPM) a novel solution for gapfill with HDP-CVD." This patent describes a process for depositing a silicon oxide film on a substrate within a process chamber. The process involves flowing a gas mixture that includes a halogen source, a fluent gas, a silicon source, and an oxidizing gas reactant into the chamber. A plasma is generated from this gas mixture, which facilitates the deposition of the silicon oxide film with a halogen concentration of less than 1.0%. The innovative aspect of this process is its simultaneous deposition and sputtering components, optimizing the film quality.
Another significant patent is focused on "Low stress STI films and methods." This invention relates to low compressive stress doped silicate glass films for shallow trench isolation (STI) applications. The films are designed to exhibit a compressive stress of less than 180 MPa, with some embodiments achieving stress levels below 100 MPa. The incorporation of stress-lowering dopants, such as fluorine, germanium, or phosphorous, enhances the performance of these films in semiconductor applications.
Career Highlights
Lung-Tien Han is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His expertise in film deposition processes has contributed to advancements in semiconductor manufacturing technologies.
Collaborations
He has collaborated with notable coworkers, including Ellie Y Yieh and Anchuan Wang, who share a commitment to innovation in the semiconductor field.
Conclusion
Lung-Tien Han's contributions to semiconductor technology through his patents and work at Applied Materials, Inc. highlight his role as a key innovator in the industry. His advancements in film deposition processes and stress management continue to influence the development of semiconductor technologies.