This inventor holds 1 USPTO granted patent and 1 EPO patent. Top assignee: Air Products and Chemicals, Inc.. Active years: 2025.
Company Filing History:
Years Active: 2025
Title: Lulu Qi - Innovator in Wafer Oxide Removal Technology
Introduction
Lulu Qi is a prominent inventor based in Shanghai, China. She has made significant contributions to the field of semiconductor technology, particularly in the area of wafer processing. Her innovative approach has led to the development of a unique apparatus and method for wafer oxide removal and reflow treatment.
Latest Patents
Lulu Qi holds 1 patent for her invention titled "Apparatus and method for wafer oxide removal and reflow treatment." This invention focuses on an apparatus designed to efficiently remove oxide layers from wafers and facilitate reflow treatment. The apparatus includes a heating plate, a sample plate for supporting a wafer sample, and an electron attachment pin plate. The heating plate is capable of moving up and down, allowing it to contact and heat the sample plate effectively.
Career Highlights
Lulu Qi is currently employed at Air Products and Chemicals, Inc., where she continues to advance her research and development efforts. Her work has garnered attention for its potential to improve manufacturing processes in the semiconductor industry.
Collaborations
Lulu collaborates with talented individuals such as Liang Wu and Xiang Yu, who contribute to her innovative projects and research initiatives.
Conclusion
Lulu Qi's contributions to wafer oxide removal technology exemplify her dedication to innovation in the semiconductor field. Her work not only enhances manufacturing efficiency but also showcases the importance of collaboration in driving technological advancements.