Veldhoven, Netherlands

Lu Xu

This inventor holds 1 USPTO granted patent. Top assignee: Asml Netherlands B.v.. Active years: 2016.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Lu Xu. Retrieved from https://idiyas.com/inventor/lu-xu-hrv2cp31

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile


Average Co-Inventor Count = 5.0

ph-index = 1

Forward Citations = 3(Granted Patents)


Company Filing History:


Years Active: 2016

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1 patent (USPTO):Explore Patents

Sure, here is the article about inventor Lu Xu:

Title: Unveiling the Innovations of Lu Xu: A Pioneer in Lithographic Quality Determination

Introduction: Lu Xu, a distinguished inventor based in Veldhoven, NL, has made significant contributions to the field of lithography with his groundbreaking patent.

Latest Patents: Lu Xu holds a single patent titled "Method and apparatus for determining lithographic quality of a structure." This innovative method involves detecting lithographic process window edges and determining the optimum process conditions using a periodic pattern such as a grating.

Career Highlights: Lu Xu is known for his exceptional work at ASML Netherlands B.V., a prominent technology company specializing in lithography equipment. His expertise and dedication have played a pivotal role in advancing lithographic processes.

Collaborations: Throughout his career, Lu Xu has collaborated with industry experts such as Willem Jan Grootjans and Henricus Johannes Lambertus Megens. Together, they have worked on cutting-edge projects that have shaped the future of lithography.

Conclusion: Lu Xu's relentless pursuit of innovation and his commitment to excellence have established him as a trailblazer in the field of lithography. His patent stands as a testament to his ingenuity and unwavering passion for advancing technology.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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