Company Filing History:
Years Active: 2003-2004
Title: Lu-Chang Chen: Innovator in Ion Implantation Technology
Introduction
Lu-Chang Chen is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of ion implantation technology, holding a total of 3 patents. His work focuses on improving the efficiency and accuracy of ion implanters, which are crucial in semiconductor manufacturing.
Latest Patents
One of Lu-Chang Chen's latest patents is an "Apparatus for calibrating the position of a wafer platform in an ion implanter." This invention provides a method for ensuring that the wafer platform is properly calibrated at a zero-angle position, which is essential for the precision of ion implantation. The apparatus includes a curvilinear piece, linear rods, and cross-bracing rods to maintain rigidity and accuracy during the calibration process.
Another significant patent is the "Method and apparatus for avoiding driver gas contamination in an ion implanter gas supply module." This invention outlines a gaseous supply system that controls the delivery of gaseous source materials to the ion source chamber. It includes a pneumatic valve system that ensures the driver gas source has a different atomic mass unit than the source material ions, thereby preventing contamination during the implantation process.
Career Highlights
Lu-Chang Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at TSMC has allowed him to apply his innovative ideas in a practical setting, contributing to advancements in semiconductor technology.
Collaborations
Lu-Chang has collaborated with several talented individuals in his field, including Yu-Chun Peng and Yi-Yao Tang. These collaborations have fostered a creative environment that encourages the development of new technologies and solutions in ion implantation.
Conclusion
Lu-Chang Chen's contributions to ion implantation technology through his patents and work at TSMC highlight his role as an influential inventor in the semiconductor industry. His innovative approaches continue to shape the future of semiconductor manufacturing.