Ijamsville, MD, United States of America

Loren W Linholm


Average Co-Inventor Count = 4.3

ph-index = 8

Forward Citations = 349(Granted Patents)


Company Filing History:


Years Active: 1993-1999

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10 patents (USPTO):Explore Patents

Title: Innovations by Loren W. Linholm: A Pioneer in Semiconductor Calibration

Introduction

Loren W. Linholm, an inventive mind based in Ijamsville, Maryland, holds an impressive portfolio of 10 patents related to advanced imaging instruments and semiconductor technologies. His work focuses on improving measurement accuracy and calibration processes for complex fabrication environments, significantly contributing to the semiconductor industry.

Latest Patents

Among Linholm's most notable patents is the "Overlay Target and Measurement Procedure to Enable Self-Correction for Imaging Instruments." This innovation addresses the calibration of imaging instruments used in inspecting products like semiconductor chips by utilizing a reference test structure that ensures accurate optical measurements, free from shifts that might arise during the manufacturing process. By integrating supplementary imaging-sensor means, his approach allows imaging instruments to self-correct, enhancing their reliability and performance. Another noteworthy patent is the "Monocrystalline Test and Reference Structures." This invention describes a refined test structure for measuring the width of conductive lines in semiconductor fabrication. It involves the use of a monocrystalline material with an insulative layer created via ion implantation, allowing for precise component definition and enhanced transmissive-optical inspection techniques.

Career Highlights

Loren W. Linholm has had a remarkable career, contributing significantly to the field of semiconductor technology. His work has not only led to numerous patents but also advanced the methodologies employed in the calibration of imaging instruments essential for quality assurance in semiconductor manufacturing.

Collaborations

Throughout his career, Linholm has worked alongside esteemed colleagues including Richard A. Allen and Michael W. Cresswell. Their collaborative efforts have propelled innovations forward in measuring instruments and calibration techniques, indicating the strength of teamwork in the pursuit of technological advancement.

Conclusion

Loren W. Linholm's contributions to the field of semiconductor calibration through his diverse patents demonstrate his role as a key innovator. With a focus on enhancing measurement precision and instrument reliability, he continues to influence the industry significantly, marking him as an essential figure in the evolution of semiconductor technologies.

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