Long-Hui Lin

Title: The Innovations of Long-Hui Lin

Introduction

Long-Hui Lin is a prominent inventor based in Hsin-Chu Hsien, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 7 patents. His work focuses on methods and systems for defect inspection in semiconductor wafers, showcasing his expertise and innovative approach.

Latest Patents

Among his latest patents is a method of defect inspection that involves selecting a plurality of cassettes, each containing wafers with first defect information. Each cassette is assigned to a corresponding tool with at least one reaction chamber, ensuring that the wafers are substantially equally distributed among the chambers. A first process is performed on each wafer, followed by a first defect inspection process. Another notable patent is related to wafer defect detection methods and systems. This method involves spraying a plurality of PSL particles on a wafer and implementing an inspection operation to obtain location information for defects. The process includes calculating offset location information for each defect and correcting the error values based on this information.

Career Highlights

Long-Hui Lin is currently employed at Powerchip Semiconductor Corporation, where he continues to advance semiconductor technology through his innovative work. His contributions have been instrumental in improving defect detection methods, which are crucial for the efficiency and reliability of semiconductor manufacturing.

Collaborations

He collaborates with talented coworkers, including Chia-Yun Chen and Feng-Ming Kuo, who contribute to the innovative environment at Powerchip Semiconductor Corporation.

Conclusion

Long-Hui Lin's work in semiconductor technology exemplifies the impact of innovation on industry standards. His patents and methods are paving the way for advancements in defect inspection, ensuring higher quality in semiconductor production.