The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2006
Filed:
Feb. 06, 2004
Long-hui Lin, Hsin-Chu Hsien, TW;
Feng-ming Kuo, Tao-Yuan Hsien, TW;
Su-fen Cheng, Tainan Hsien, TW;
Long-Hui Lin, Hsin-Chu Hsien, TW;
Feng-Ming Kuo, Tao-Yuan Hsien, TW;
Su-Fen Cheng, Tainan Hsien, TW;
Powerchip Semiconductor Corp., Hsin-Chu, TW;
Abstract
First, a wafer with a plurality of defects generated in a first semiconductor process is provided. A defect inspection is performed to detect the defects on the wafer. Then, an automatic defect classification is performed according to a predetermined defect database having a defect classification recipe generated from a second semiconductor process. After that, a verifying process is further performed by comparing the result of the automatic defect classification with that of a manual defect classification to verify the accuracy of the automatic defect classification.