Liqin Liu

Title: The Innovation Journey of Liqin Liu in Super-Resolution Imaging Photolithography

Introduction

Liqin Liu, an accomplished inventor based in Chengdu, China, has made significant contributions to the field of photolithography through his innovative patent focused on super-resolution imaging technology. With one patent to her name, Liu's work showcases pioneering methods and apparatuses that enhance imaging precision in various applications.

Latest Patents

Liu's notable patent, titled "Super-resolution imaging photolithography," provides groundbreaking apparatuses and methods designed for super-resolution imaging. This invention includes an illumination light generation device that generates illumination light to image a pattern contained in a mask. The apparatus leverages a high-frequency spatial spectrum, enabling the conversion of a high-frequency evanescent wave component of the spatial spectrum information into a low-frequency evanescent wave component. The design allows for the implementation of high numerical aperture (NA) illumination modes and surface plasmon (SP) wave illumination modes, broadening the scope of super-resolution imaging applications.

Career Highlights

Liqin Liu's career is marked by her tenure at the esteemed Chinese Academy of Sciences, where she continues to push the boundaries of innovation in imaging technology. Liu's commitment to research and development in her field is evident through her inventive contributions, underscoring her expertise and influence as an inventor.

Collaborations

Throughout her career, Liu has collaborated with distinguished colleagues, including Xiangang Luo and Changtao Wang. These collaborations highlight the cooperative spirit within the research community at the Chinese Academy of Sciences, fostering an environment that promotes cutting-edge developments in technology and innovation.

Conclusion

Liqin Liu's pioneering work in super-resolution imaging photolithography exemplifies the impact of innovation in modern science and technology. Her commitment to advancing imaging methods not only contributes to academic knowledge but also serves practical applications across various industries. As she continues her journey, Liu remains a notable figure in the landscape of inventors focused on groundbreaking technologies.