Linuan Chen

Title: Innovations of Linuan Chen in Ion Beam Technology

Introduction

Linuan Chen is a notable inventor based in San Jose, CA, who has made significant contributions to the field of ion beam technology. With a total of 3 patents to his name, Chen's work focuses on enhancing the efficiency and precision of ion implantation processes.

Latest Patents

One of Linuan Chen's latest patents is titled "Method and device of ion source generation." This invention involves an implanter equipped with an ion beam current detector, a temperature sensor, a temperature controller, and a cooling system. The purpose of this invention is to increase the ratio of a specific ion cluster in the ion source chamber of the implanter, thereby improving the implanting efficiency for shallow ion implantation.

Another significant patent is the "Apparatus for decelerating ion beams with minimal energy contamination." This invention describes an ion implantation apparatus that includes a target chamber for containing a target for implantation and an ion source chamber with a mass filter for generating an ion beam with specific mass and original energy. The apparatus features beam deceleration optics that allow for the accurate direction of low-energy ions to a target wafer. This innovation aims to eliminate energy contamination by controlling the energy range of charged ions that reach the target for implantation.

Career Highlights

Linuan Chen is currently employed at Advanced Ion Beam Technology, Inc., where he continues to develop cutting-edge technologies in ion beam applications. His work has been instrumental in advancing the capabilities of ion implantation, which is crucial for various applications in semiconductor manufacturing and materials science.

Collaborations

Throughout his career, Linuan Chen has collaborated with notable colleagues, including Jin-Liang Chen and Nai-Yuan Cheng. These collaborations have contributed to the development of innovative solutions in the field of ion beam technology.

Conclusion

Linuan Chen's contributions to ion beam technology through his patents and work at Advanced Ion Beam Technology, Inc. highlight his role as a key innovator in this specialized field. His inventions not only enhance the efficiency of ion implantation but also pave the way for future advancements in semiconductor technology.