This inventor holds 1 USPTO granted patent. Top assignee: Luxtron Corporation. Active years: 2000.
Company Filing History:
Years Active: 2000
Title: Lin Jun Zhou: Innovator in Process Monitoring Technology
Introduction
Lin Jun Zhou is a notable inventor based in Palo Alto, California. He has made significant contributions to the field of process monitoring technology, particularly in the context of integrated circuit structures. His innovative approach has led to the development of a unique patent that enhances the efficiency of material removal processes.
Latest Patents
Lin Jun Zhou holds a patent for an "In situ technique for monitoring and controlling a process." This invention involves an apparatus designed for removing material from an article, such as the exposed surface of an intermediate integrated circuit structure. The technology utilizes a sensor that is mechanically coupled to a moving carrier of the article. It directs an electromagnetic radiation beam through the article to its first side, where the structure is substantially transparent. The beam interacts with the article and is detected after being reflected from its exposed surface. The resulting information regarding the state of the processing is transmitted from the moving carrier to a stationary receiver without the need for physical transmission media like wires or optical fibers. Multiple sensors mounted on the moving article carrier provide valuable information about the uniformity of the processing across the exposed surface. The radiation signal received by the stationary receiver is instrumental in monitoring or controlling the processing, including determining an endpoint.
Career Highlights
Lin Jun Zhou is currently associated with Luxtron Corporation, where he applies his expertise in process monitoring technology. His work has been pivotal in advancing the capabilities of integrated circuit manufacturing processes. With a focus on innovation, he continues to contribute to the field through his research and development efforts.
Collaborations
Lin has collaborated with esteemed colleagues, including Earl M Jensen and Frank J Hausman. Their combined expertise has fostered a productive environment for innovation and technological advancement.
Conclusion
Lin Jun Zhou is a distinguished inventor whose work in process monitoring technology has made a significant impact on the field of integrated circuits. His patent reflects a commitment to innovation and efficiency in manufacturing processes.