Lin-Hsin Tu

Title: Lin-Hsin Tu’s Patents in Optical Inspection and Photomask Handling.

Introduction

Lin-Hsin Tu is an inventor based in Hsinchu, Taiwan. His patent work includes technologies for inspecting circuit surfaces and carrying photomask boxes. He is associated with Gudeng Equipment Co., Ltd. and holds 2 patents.

Latest Patents

Tu’s listed patents address two distinct equipment challenges in manufacturing and inspection.

- **Optical inspection system of eliminating image noise.** This system uses polarized illumination and image processing to distinguish circuit defects from patterns caused by surface metallic texture. A linear light source sends light through a polarizer onto the circuits, while an optical detector captures reflected light through a second polarizer. An operation processor analyzes the resulting image to identify defects apart from the metallic texture pattern.

- **Photomask box carrying device.** This device is designed to carry target boxes made to either of two standards. Carrying components are positioned to support the overlapping areas of the boxes’ respective carrying regions. A rotary component adjusts the base’s level relative to the substrate, while a clamping component abuts the side of the target box.

Career Highlights

Tu’s listed inventions focus on practical equipment functions: improving the reliability of optical inspection and accommodating photomask boxes with different standards. Both patents describe systems that combine mechanical components with carefully arranged optical or support features.

Collaborations

Tu is associated with Gudeng Equipment Co., Ltd. His listed coworkers include Yi-Xuan Lu and Fang-Yin Jhu.

Conclusion

Lin-Hsin Tu’s patent portfolio reflects work on manufacturing inspection and photomask handling, with inventions aimed at distinguishing circuit defects and supporting boxes built to different standards.