Lili Ji

Title: Lili Ji: Innovator in Wafer Processing Technology

Introduction

Lili Ji is a prominent inventor based in Santa Clara, CA, known for her contributions to the field of wafer processing technology. With a total of 4 patents to her name, she has made significant advancements that enhance the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

One of her latest patents is titled "Hydrogen plasma based cleaning process for etch hardware." This patent provides methods for cleaning chamber components post substrate etching. In this method, an etching gas mixture is activated using plasma to create an activated etching gas mixture. This mixture, which includes a hydrogen-containing precursor and a fluorine-containing precursor, is delivered to a processing region of a process chamber. The process chamber features an edge ring that comprises both a catalyst and anticatalytic material, allowing the activated gas to effectively remove the anticatalytic material from the edge ring.

Another notable patent is "Wafer processing equipment having exposable sensing layers." This invention includes devices and methods for detecting particles, monitoring etch or deposition rates, and controlling operations within a wafer fabrication process. In this embodiment, micro sensors are mounted on wafer processing equipment, capable of measuring material deposition and removal rates in real-time. The micro sensors are designed to be selectively exposed, ensuring that a sensing layer of a micro sensor is protected by a mask layer during the active operation of another micro sensor. The protective mask layer can be removed to expose the sensing layer when the other micro sensor reaches its end-of-life.

Career Highlights

Lili Ji is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. Her work focuses on developing innovative solutions that improve wafer processing technologies.

Collaborations

Throughout her career, Lili has collaborated with notable colleagues, including Nitin K Ingle and Leonard Michael Tedeschi. These collaborations have contributed to her success and the advancement of technology in her field.

Conclusion

Lili Ji's innovative work in wafer processing technology has made a significant impact on the semiconductor industry. Her patents reflect her commitment to enhancing manufacturing processes and her role as a leading inventor in this field.