Lihua Li Huang

Title: Lihua Li Huang: Innovator in Plasma Processing Technologies

Introduction

Lihua Li Huang is a prominent inventor based in Pleasanton, CA (US). She has made significant contributions to the field of plasma processing technologies, holding a total of 3 patents. Her innovative work focuses on improving methods for treating ceramic layers and drilling techniques for brittle materials.

Latest Patents

One of her latest patents is a method for conditioning a ceramic layer with a thickness of less than 150 μm over a substrate. This method involves cleaning the ceramic layer and scanning a region of it with a pulsed excimer laser beam at a repetition rate of 3-300 Hz. Another notable patent is related to ductile mode drilling methods for brittle components of plasma processing apparatuses. This method allows for drilling holes in nonmetallic hard and brittle materials by controlling the depth of cut, which leads to high-pressure phase transformation and the formation of amorphous portions during chip formation.

Career Highlights

Lihua Li Huang is currently employed at Lam Research Corporation, where she continues to develop innovative solutions in her field. Her work has been instrumental in advancing the capabilities of plasma processing technologies.

Collaborations

Some of her notable coworkers include Duane D Scott and Joseph P Doench, who have collaborated with her on various projects within the company.

Conclusion

Lihua Li Huang's contributions to the field of plasma processing are noteworthy, and her patents reflect her innovative spirit and dedication to advancing technology. Her work continues to influence the industry and inspire future innovations.