This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Fei Comapny. Active years: 2023.
Company Filing History:
Years Active: 2023
Title: Libor Strakos: Innovator in Electron Channeling Patterns
Introduction
Libor Strakos is a notable inventor based in Brno, Czech Republic. He has made significant contributions to the field of materials science, particularly in the area of electron channeling patterns. His innovative work has led to advancements in determining offcut angles of crystalline samples, which is crucial for various applications in semiconductor technology.
Latest Patents
Libor Strakos holds a patent titled "Offcut angle determination using electron channeling patterns." This patent describes methods and apparatus that determine the offcut angle of a crystalline sample using electron channeling patterns (ECPs). The backscattered electron intensity exhibits angular variation dependent on crystal orientation. A zone axis normal to a given crystal plane follows a circle as the sample is azimuthally rotated. On an ECP image presented with tilt angles as axes, the radius of the circle represents the offcut angle of the sample. Large offcut angles are determined by a tilt technique that brings the zone axis into the ECP field of view. ECPs are produced with a scanning electron beam and a monolithic backscattered electron detector, or alternatively with a stationary electron beam and a pixelated electron backscatter diffraction detector. This method is 40 times faster than X-ray diffraction and offers an accuracy of 0.01-0.1 degrees, making it highly applicable in semiconductor applications.
Career Highlights
Libor Strakos is currently associated with FEI Company, where he continues to push the boundaries of innovation in electron microscopy and materials characterization. His work has not only advanced scientific understanding but has also contributed to practical applications in the semiconductor industry.
Collaborations
Throughout his career, Libor has collaborated with esteemed colleagues such as Han Han and Thomas Hantschel. These collaborations have fostered a rich environment for innovation and have led to significant advancements in their respective fields.
Conclusion
Libor Strakos is a distinguished inventor whose work in electron channeling patterns has paved the way for advancements in semiconductor technology. His contributions are invaluable to the field, and his innovative spirit continues to inspire future developments.