Liang Yu Chen

Title: Innovations by Liang Yu Chen in Semiconductor Processing

Introduction

Liang Yu Chen is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor processing, particularly through his innovative patent that addresses critical challenges in etching tools.

Latest Patents

Liang Yu Chen holds a patent for a semiconductor processing tool and methods of operation. This patent provides techniques and apparatuses aimed at improving the uniformity of gas flow across a semiconductor substrate in an etch tool. The etch tool features an exhaust port located at the bottom center of the chamber, along with a flow-control subsystem that includes an impeller and a thermal component. By varying the rotational velocity of the impeller and the amount of heat transferred from the thermal component, the uniformity of gas flow can be enhanced. This innovation leads to an increased etching rate and reduces contamination defects caused by particulate clustering, ultimately improving the yield of semiconductor products fabricated using the etch tool.

Career Highlights

Liang Yu Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading organization in the semiconductor industry. His work focuses on developing advanced technologies that enhance semiconductor manufacturing processes.

Collaborations

Liang collaborates with Yu Hsi Tang, a fellow innovator in the field. Their combined expertise contributes to the advancement of semiconductor technologies.

Conclusion

Liang Yu Chen's contributions to semiconductor processing through his innovative patent demonstrate his commitment to improving manufacturing efficiency and product quality. His work continues to influence the semiconductor industry positively.