Location History:
- Tainan, TW (2006)
- Hsin-Chu, TW (2006)
Company Filing History:
Years Active: 2006
Title: Innovations of Inventor Li-Jia Yang
Introduction
Li-Jia Yang is a notable inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patents. With a total of 2 patents, Yang's work focuses on enhancing the efficiency and effectiveness of chemical mechanical polishing processes.
Latest Patents
One of Li-Jia Yang's latest patents is a method for chemical mechanical polishing of a shallow trench isolation structure. This method employs a sequence of slurry polishes, beginning with either a silica-based slurry or a diluted ceria-based slurry. The first polishing step achieves a higher removal rate than the subsequent step, allowing for some planarization without exposing the polish stop layer. After partial planarization, a high selectivity slurry is used to complete the process, resulting in improved throughput, lower defects, and good within wafer uniformity.
Another significant patent is the in-line hot-wire sensor for slurry monitoring. This invention includes a number of resistors organized into a Wheatstone bridge, along with a frequency-domain transform mechanism. The hot-wire resistor is placed in-line with the slurry after mixing, allowing the Wheatstone bridge to yield a signal that is transformed to the frequency domain. This transformation is utilized to monitor the mixing of substances into the slurry and the flow rate of the slurry, with the signal being amplified prior to transformation.
Career Highlights
Li-Jia Yang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to innovate in the semiconductor industry. His work has been instrumental in advancing the technology used in chemical mechanical polishing, which is critical for the production of high-quality semiconductor devices.
Collaborations
Yang collaborates with notable colleagues, including Tung-Ching Tseng and Syun-Ming Jang. Their combined expertise contributes to the development of cutting-edge technologies in the semiconductor field.
Conclusion
Li-Jia Yang's contributions to the semiconductor industry through his innovative patents demonstrate his commitment to advancing technology. His work not only enhances manufacturing processes but also sets a foundation for future innovations in the field.