Company Filing History:
Years Active: 2007
Title: The Innovations of Li-Heng Chou
Introduction
Li-Heng Chou is a prominent inventor based in Kaohsiung, Taiwan. He has made significant contributions to the field of semiconductor technology. His innovative work has led to the development of a unique patent that enhances the precision of semiconductor wafer alignment.
Latest Patents
Li-Heng Chou holds a patent for an invention titled "In-situ overlay alignment." This patent describes a semiconductor wafer that includes multiple fields, each containing alignment fields. Each alignment field is equipped with several intra-field small scribe lane primary mark (SSPM) overlay mark pairs. These SSPM mark pairs facilitate in-situ, non-passive intra-field alignment correction. The design allows for flexibility, with embodiments featuring between two and four alignment fields and corresponding SSPM mark pairs.
Career Highlights
Li-Heng Chou is associated with Taiwan Semiconductor Manufacturing Company Limited, a leading entity in the semiconductor industry. His work at this company has been instrumental in advancing semiconductor manufacturing processes. His innovative approach has garnered attention and respect within the industry.
Collaborations
Li-Heng Chou has collaborated with notable colleagues, including Grace H Ho and Ming-Che Wu. These partnerships have contributed to the successful development of his patent and further innovations in semiconductor technology.
Conclusion
Li-Heng Chou's contributions to semiconductor technology through his patent on in-situ overlay alignment demonstrate his expertise and innovative spirit. His work continues to influence the industry and pave the way for future advancements.