Li-chun Wang

Title: Li-chun Wang and Advanced Ceramic Technology.

Introduction

Li-chun Wang is an inventor based in Hsinchu, Taiwan. His work includes a patent concerning a high-density spinel ceramic article and its use in semiconductor manufacturing equipment. Wang is associated with Taiwan Semiconductor Manufacturing Company Limited and has 1 patent listed in the information provided.

Latest Patents

Wang’s patent, “Ceramic Article, Semiconductor Apparatus for Manufacturing a Semiconductor Structure and Method of Manufacturing a Ceramic Article,” describes a ceramic body containing a spinel (MgAlO) structure. The patent specifies that the spinel’s density must exceed 99.5% of the theoretical density of spinel.

The invention also covers semiconductor manufacturing apparatus that incorporates this ceramic article. Its manufacturing method involves providing a green body, heating it to a sintering temperature, compressing it, and applying an electrical pulse to form the spinel-containing ceramic body.

Career Highlights

The patent connects Wang’s inventive work with materials and equipment used in semiconductor manufacturing. The ceramic’s high density is a central feature of the disclosed article and apparatus.

Collaborations

Wang’s listed coworker is Ren-guan Duan, who is a woman. The information provided identifies both inventors in connection with the work but does not specify their individual contributions.

Conclusion

Li-chun Wang’s patent focuses on a dense spinel ceramic and a process for producing it, with potential application in semiconductor manufacturing equipment.