Location History:
- Yang-mei, TW (2004)
- Tooyang, TW (2005)
Company Filing History:
Years Active: 2004-2005
Title: An Insight into Inventor Li-Chih Chaio
Introduction
Li-Chih Chaio, an accomplished inventor based in Tooyang, Taiwan, has made significant contributions to the field of semiconductor manufacturing. With two patents under his name, Chaio's innovations focus on improving processes critical to the efficiency and quality of semiconductor fabrication.
Latest Patents
Chaio's latest patents demonstrate his expertise in semiconductor technology. The first patent, titled "Method for removing polymeric residue contamination on semiconductor feature sidewalls," addresses the challenge of undeveloped photoresist contamination in photolithographic patterning. This method includes multiple steps, such as providing a semiconductor feature and a photoresist layer, followed by the deposition and removal of a polymeric passivation layer to eliminate contamination effectively.
His second patent, "Method for improved plasma etching control," introduces a novel approach to plasma etching by enhancing etching selectivity for nitride-containing DARC and low-k dielectric layers. By adjusting the nitrogen to oxygen ratios, this method achieves improved selectivity, ensuring optimized etching processes in semiconductor manufacturing.
Career Highlights
Chaio is currently affiliated with Taiwan Semiconductor Manufacturing Company Limited, a leader in the semiconductor industry known for its cutting-edge technology and innovative processes. His role at the company allows him to apply his research and inventions directly to practical applications that benefit semiconductor manufacturing.
Collaborations
In his pursuit of innovation, Chaio collaborates with notable colleagues, including Jen-Cheng Liu and Yi-Nien Su. Working alongside these skilled professionals fosters a productive environment for generating new ideas and refining existing technologies within the semiconductor sector.
Conclusion
Li-Chih Chaio's contributions to semiconductor manufacturing are marked by his innovative patents aimed at enhancing production processes. With a solid foundation in technical knowledge and collaborative efforts within his company, Chaio continues to make strides in semiconductor technology, ensuring quality and efficiency in the ever-evolving landscape of this crucial industry.