Location History:
- Eagle, CO (US) (1987)
- Champaigne, IL (US) (1991 - 1992)
Company Filing History:
2 out of 1,521 
Years Active: 1987-1992
Title: Innovator Leslie H. Allen: Pioneering Advances in Semiconductor Technology
Introduction
Leslie H. Allen is an accomplished inventor based in Champaign, Illinois, recognized for her significant contributions to semiconductor technology. With a total of three patents to her name, Allen has been instrumental in enhancing the processes involved in the selective deposition of conductive metals, particularly tungsten, in integrated circuit fabrication.
Latest Patents
One of Leslie H. Allen's latest patents focuses on the "Selective deposition of tungsten on TiSi.sub.2." This innovative process enhances the preparation of selective deposition of conductive metals on disilicide encroachment barriers. The patented technique allows for the construction of integrated circuit components where the metal/disilicide interface is nearly free of oxygen and/or fluorine contamination. The method substantially reduces interfacial oxygen and/or fluorine contamination through a series of steps: first, forming a C49 TiSi.sub.2 phase on a substrate, then selectively depositing tungsten on the C49 TiSi.sub.2 phase, and finally annealing at a temperature adequate to convert the high-resistivity C49 TiSi.sub.2 to the low-resistivity C54 TiSi.sub.2 phase.
Career Highlights
Leslie H. Allen is affiliated with the Cornell Research Foundation Inc., where her expertise and inventive spirit continue to drive advancements in semiconductor manufacturing. Her work not only contributes to the field of electronics but also sets new standards for the purity and quality of metal interfaces in integrated circuits.
Collaborations
In her journey as an inventor, Leslie has had the opportunity to collaborate with talented individuals, including her coworkers David Stanasolovich and James W. Mayer. These collaborations have further fueled her innovative projects and enhanced the outcomes of her research efforts.
Conclusion
Leslie H. Allen's work exemplifies the spirit of innovation and highlights the importance of precise processes in semiconductor technology. Her patents pave the way for improved manufacturing techniques in the industry, showcasing the crucial role inventors play in advancing technology for the future.